By Vijay K. Varadan, K. J. Vinoy, S. Gopalakrishnan
Offering unified insurance of the layout and modeling of shrewdpermanent micro- and macrosystems, this booklet addresses fabrication matters and descriptions the demanding situations confronted by means of engineers operating with shrewdpermanent sensors in a number of purposes.
half I offers with the elemental ideas of a regular shrewdpermanent approach and its constituent elements. initial fabrication and characterization thoughts are brought earlier than layout ideas are mentioned intimately. half III provides a finished account of the modeling of clever platforms, shrewdpermanent sensors and actuators. half IV builds upon the basic recommendations to investigate fabrication strategies for silicon-based MEMS in additional aspect.
working towards engineers will enjoy the particular overview of functions in communications know-how, aerospace, biomedical and mechanical engineering. The booklet offers an important reference or textbook for graduates following a direction in clever sensors, actuators and platforms.
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Extra resources for Smart Material Systems and MEMS: Design and Development Methodologies
Example text
The polyimide-based ferrite magnetic composites have been used as polymer magnets for magnetic microactuators [42]. In addition to being used as sensing and actuating materials, polymers have also been used for electronics materials. Polymer transistors have been developed. Therefore, integrating polymer sensors, actuators and electronics into polymeric MEMS will be practical for some special applications. 1 Classification of polymers Polymers can be classified, based on their structure (linear, branched or cross-linked), by the method of synthesis, physical properties (thermoplastic or thermoset) and by end-use (plastic, elastomer, fiber or liquid resin).
E. the chemical repeat unit in the polymer is the same as the monomer. ), instead of simply adding together, the process is called step-growth polymerization. In this case, the chemical repeat unit is different from the monomer. 1 Addition polymerization Compounds containing a reactive double bond usually undergo addition polymerization, also called chain polymerization. In this type of polymerization process, a low-molecular-weight monomer molecule with a double bond breaks the double bond so that the resulting free valencies will be able to bond to other similar molecules to form the polymer.
The resulting ‘2½-dimensional’ structures are mainly located on the surface of the silicon wafer and exist as a thin film – hence the ‘half dimension’. The main advantage of surface-micromachined structures is their easy integration with IC components, since the same wafer surface can also be processed for IC elements. Surface micromachining can therefore be used to build monolithic MEMS devices. 6 POLYMERS AND THEIR SYNTHESIS Polymers are very large molecules (macromolecules) made up of a number of small molecules.