By R.F. Egerton
Scanning and stationary-beam electron microscopes became an quintessential instrument for either learn and regimen assessment in fabrics technological know-how, the semiconductor undefined, nanotechnology, and the organic and scientific sciences. Physical rules of Electron Microscopy presents an advent to the speculation and present perform of electron microscopy for undergraduate scholars who are looking to gather an appreciation of ways simple rules of physics are used in a huge sector of utilized technological know-how, and for graduate scholars and technologists who utilize electron microscopes. whilst, this ebook should be both necessary for collage lecturers and researchers who desire a concise supplemental textual content that bargains with the fundamental rules of microscopy.
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Extra info for Physical Principles of Electron Microscopy
Sample text
Note that the angle of deflection D is independent of the glass thickness but increases with increasing prism angle. Ia Ib O I Figure 2-4. A convex lens focusing rays from axial object point O to an axial image point I . In Fig. 2-4, we have shown only rays that originate from a single point in the object, which happens to lie on the optic axis. In practice, rays originate from all points in the two-dimensional object and may travel at various angles relative to the optic axis. A ray diagram that showed all of these rays Chapter 2 32 backfocal plane x0 image T F T object principal plane xi f u v Figure 2-5.
The angle D now represents the maximum angle of the focused electrons, which might be determined by the internal diameter of the lens bore or by a circular aperture placed in the optical system. Figure 2-11 is directly relevant to a scanning electron microscope (SEM), where the objective lens focuses a near-parallel beam into an electron probe of very small diameter at the specimen. Because the spatial resolution of the secondary-electron image cannot be better than the probe diameter, spherical aberration might be expected to limit the spatial resolution to a value of the order of 2rs.
Because higher accelerating voltages permit better image resolution, magnetic lenses are generally preferred for electron microscopy. Magnetic lenses also provide somewhat lower aberrations, for the same focal length, further improving the image resolution. As we will see later in this chapter, lens aberrations are also reduced by making the focal length of the objective lens small, implying a magnetic immersion lens with the specimen present within the lens field. Such a concept is problematic for an electrostatic objective, where introducing a conducting specimen could greatly modify the electric-field distribution.