By Ludwig Reimer
Scanning Electron Microscopy provides an outline of the physics of electron-probe formation and of electron-specimen interations. the various imaging and analytical modes utilizing secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling results, and cathodoluminescence are mentioned to judge particular contrasts and to procure quantitative information.
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Additional resources for Scanning Electron Microscopy: Physics of Image Formation and Microanalysis
Sample text
1). A disadvantage of in-lens operation is the small specimen size. 43], in which the specimen is situated below the lower polepiece but the working 28 2. Electron Optics of a Scanning Electron Microscope PE Fig. 11. Single polepiece lens used as probe-forming lens behind the specimen with SE and BSE trajectories inside the magnetic front field Water - cooled single polepiece lens distances are small, typically 1-2 mm. 44]. Single-Polepiece Lenses. Conventional electron lenses as shown in Figs.
7fd§/ 4l 2 . A Faraday cage behind the second diaphragm measures 111 and (3 = 111 = I1S 11s? (~) 7fd 1 d 2 2 111. 9) A test of the accuracy of the measurement is that the resulting value of (3 should be independent of d 1 , which will be the case only if this diaphragm is sufficiently small. Crossover-Projection Method. The FWHM (full width at half maximum) de of the crossover profile is measured by one of the techniques described above and this value is used as d 1 (Fig. 5b). The aperture is defined by the lens diaphragm of diameter d 2 and its distance from the crossover.
29) shows that the last two terms, which contain C s and C c are approximately independent of j or W whereas the first term is proportional to j2 for a constant probe current Ip. 5 Wave-Optical Theory of Electron-Probe Formation The foregoing geometric-optical treatment of lens aberrations is adequate for the discussion in Sect. 4 of electron-probe formation when using thermionic cathodes. In this case we have completely incoherent illumination and wave-optical effects can be neglected. 66, 69-71] and hence to define the lens aberrations in wave optical terms.